%0 Book Section
%@nexthigherunit 8JMKD3MGPCW/3F35BSP
%@nexthigherunit 8JMKD3MGPCW/46KTFK8
%@nexthigherunit 8JMKD3MGPCW/46KUES5
%2 sid.inpe.br/plutao/2021/12.14.18.24.34
%4 sid.inpe.br/plutao/2021/12.14.18.24
%3 santos_formation.pdf
%A Santos, Nazir Monteiro dos,
%A Barbosa, Divani Carvalho,
%A Corat, Evaldo José,
%A Ueda, Mario,
%@secondarytype PRE LI
%B The Great World of Nanotechnology Vol II
%D 2021
%E Nobre, M. A. L.,
%F lattes: 3956926180174007 2 MonteirodosSantosMitUedDurSan:2021:XRPHSP
%I Editora Artemis
%K Plasma Immersion Ion Implantation. Surface Modification., Ultrananocrystalline Diamond Films. Conductive tubes.
%P 109-124
%T Formation of metal nanoparticles by sputter deposition on UNCD films by NPIII inside conductive tubes
%U https://www.editoraartemis.com.br/artigo/32225/
%V Vol II
%X Surface modification of ultrananocrystalline diamond (UNCD) films by Nitrogen Plasma Immersion Ion Implantation (NPIII) using conductive tubes was studied. UNCD films were deposited on titanium substrates by CVD process using a hot filament reactor. The UNCD films were treated by NPIII inside stainless steel metallic tubes. The tubes, with 150 mm of length and different diameters, containing the UNCD films were placed in the interior of vacuum chamber of 600 liters. Field Emission Gun Scanning Electron Microscopy (FEG-SEM) with Energy Dispersive Spectroscopy (EDS) auxiliary, X-Ray Diffraction (XRD), Raman Scattering Spectroscopy (RSS), and X-ray Photoelectron Spectroscopy (XPS) were used to investigate the effect of NPIII treatment on UNCD films. The results showed that the NPIII treatment changed the surface morphology of UNCD films, increased the degree of disorder and the structural defects, and the formation of metallic nanoparticles by sputter deposition of the materials from the conductive tubes. Surface analysis have also demonstrated substantial dependence of NPIII with the conductive tubes diameter. For the UNCD film treatment by NPIII inside tube with diameter of 110 mm (T110), there was formation of metal oxide and nitride layers on the surface. For the treatment carried out inside the tube with a diameter of 40 mm (T40), there was implantation of metallic particles, indicating that the surface of the UNCD films was completely covered by iron (Feº ).
%@area FISPLASMA
%@electronicmailaddress nazirmonteiro@gmail.com
%@electronicmailaddress divanibarbosa@gmail.com
%@electronicmailaddress evaldo.corat@inpe.br
%@electronicmailaddress riomarioma247@gmail.com
%@group CSE-ETES-DIPGR-INPE-MCTI-GOV-BR
%@group
%@group COPDT-CGIP-INPE-MCTI-GOV-BR
%@group COPDT-CGIP-INPE-MCTI-GOV-BR
%@orcid 0000-0002-1518-9403
%@orcid 0000-0003-4938-4095
%@orcid 0000-0003-3011-5522
%@isbn 9786587396361
%@usergroup lattes
%@resumeid
%@resumeid
%@resumeid 8JMKD3MGP5W/3C9JH33
%@resumeid 8JMKD3MGP5W/3C9JHSB
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%@affiliation Faculdade Tecnológica (FATEC)
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%@versiontype publisher
%@holdercode {isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S}
%@doi 10.37572/EdArt_3006213618